GSL-1700X-HVC9 is CE certified 80mm diameter alumina tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion and work up to 1700oC.
| 技術參數(shù) | |
|---|---|
| Furnace Structure | ● Double layer steel casing with air cooling ● Two cooling fans inside to keep case temperature < 55oC. ● 內(nèi)爐膛表面涂有美國進口的高溫氧化鋁涂層可以提高設備的加熱效率，同時也可以延長爐膛的使用壽命 ● High purity Alumina refractory chamber ● Vacuum and gas mixing system is located in bottom cart with 4 wheel ● Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use |
| Power | 6 Kw |
| Voltage | AC 208-240V Single Phase, 50/60 Hz |
| Heating Element | 8 pcs1800°C grade MoSi2 heating element |
| Max. Temperature | 1700°C(< 1 hours ) |
| Continuous Temperature | 1600°C |
| Max. Heating Rate | ≤5°C/min |
| Tube Size and Materials | ● Premier Grade alumina tube made in USA ● （標配尺寸） ( 60mm) O.D.x I.D. (54mm) x 1000mm Length ● （選配尺寸） ( 80mm) O.D.x I.D. (74mm) x 1000mm Length ● Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).   |
| Heating Zone | ● Heating zone length: 457 mm (18") ● Constant Temperature Zone length: 150 mm (6")(+/-1oC) 注：由于測量手段及外部環(huán)境的影響，測量結果可能會有偏差，此參數(shù)僅供參考不作為該設備的技術指標。您購買產(chǎn)品需要準確的恒溫區(qū)數(shù)據(jù)，請與我公司銷售人員聯(lián)系 |
| Temperature controllers | ● One precision digital temperature controller programmable with 50 segments. ● PID adjustable with auto tune function to ensure temperature stability within +/- 1°C. 控溫儀表操作視頻 ● Full protection in each controller for over-temperature and broken thermal couple. |
| Thermal Couple | B type thermal couples built in |
| Vacuum Flanges | ● Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve ● Double high temperature silicone O-ring for using under 300°C ● Porous alumina blocks included for protecting flange from heat radiation  |
| Vacuum pumps | Tow stages vacuum pump installed in bottom case: ● One Double Steps Rotary Vane High Speed Mechanical Vacuum Pump- T2XZ-4C110with max. vacuum pressure of 10-2 torr. ● One turbo molecular pump with max. vacuum pressure of 2x10-5 torr. ● One precision vacuum sensor installed. ● Stainless steel hose tube is included for connecting to tube furnace ● Digital vacuum meter / controller installed  |
| Vacuum Sensor & display | ● Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display. ● Vacuum controller and display areinstalled in bottom cart   |
| Gas flow meter User Manual (Click to download) | ● 9 precision mass flow meters (CS200) controllers are installed in bottom cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-99% of full scale) ● one mechanical pressure meters are installed in bottom cart for monitor each gas 's pressure in mixer. ● 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.  Software and interface (optional at extra cost). Please click uderline for software operation instruction      |
| Pipe connection, valves and gas mixer | ● SS 316 1/4" pipe/fitting ● SS 316 vacuum needle valves ● 21 sets of stainless steel vacuum valves are installed outside of right side panel of cabinet to control, vacuum pump, flowing gases and two inlet gases separately. ● Please click here to see sketch of pipe connection.   |
| Dimension | Furnace: 550 x 380 x 520 Bottom case: 600x600x597 |
| Net Weight | about 100 kg |
| Shipping weight | 200 Lbs |
| Shipping package size after crating | Two cases in one plastic pallet: 45x45x35/case |
| Warranty & certificate | ● One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.) ● CE Certificate |
