類型 | PSG550 Tungsten | PSG552 Nickel | PSG554 ceramic coated |
測量范圍 | mbar | 5×10-5 … 1000 | 5×10-5 … 1000 | 5×10-5 … 1000 |
精度 (N2) | | | |
5×10-4 … 1×10-3 毫巴 | % of reading | ±50 | ±50 | ±50 |
1×10-3 … 100 毫巴 | % of reading | ±15 | ±15 | ±15 |
100 … 1000 毫巴 | % of reading | ±50 | ±50 | ±50 |
可重復性 (N2) | | | |
1×10-3 … 100 毫巴 | % of reading | ±2 | ±2 | ±2 |
容許壓力 | bar (absolute) | ≤5 | ≤5 | ≤5 |
壓力, | bar (absolute) | 10 | 10 | 10 |
容許溫度 | | | |
運行(環(huán)境) | °C | +10 … +50 | +10 … +50 | +10 … +50 |
貯存 | °C | -20 … +65 | -20 … +65 | -20 … +65 |
在法蘭處烘烤 | °C | ≤80 | ≤80 | ≤80 |
在長管法蘭處烘烤 | °C | ≤250 | ≤250 | ≤250 |
電源電壓 | V (dc) | +15 … +30 | +15 … +30 | +15 … +30 |
功耗 | | | |
無現(xiàn)場總線 | W | ≤2.5 | ≤2.5 | ≤2.5 |
DeviceNet™ | W | ≤3 | ≤3 | ≤3 |
Profibus | W | ≤3 | ≤3 | ≤3 |
輸出信號模擬 3PIx-0xx-xxx0 | V | 0 … +10 | 0 … +10 | 0 … +10 |
輸出信號模擬 3PIx-0xx-xxx1 | V | 0 … +8.5 | 0 … +8.5 | 0 … +8.5 |
輸出信號模擬 3PIx-0xx-xxx2 | V | 0 … +5.529 | 0 … +5.529 | 0 … +5.529 |
輸出信號模擬 3PIx-0xx-xxx3 | V | 0 … +8.875 | 0 … +8.875 | 0 … +8.875 |
測量范圍 3PIx-0xx-xxx0 | V | +0.61 … +10 | +0.61 … +10 | +0.61 … +10 |
測量范圍 3PIx-0xx-xxx1 | V | +1.2 … +8.5 | +1.2 … +8.5 | +1.2 … +8.5 |
測量范圍 3PIx-0xx-xxx2 | V | +0.375 … +5.529 | +0.375 … +5.529 | +0.375 … +5.529 |
測量范圍 3PIx-0xx-xxx3 | V | +1.57 … +8.875 | +1.57 … +8.875 | +1.57 … +8.875 |
電壓與壓強 | | | |
3PIx-0xx-xxx0 | volts per decade | 1.286 | 1.286 | 1.286 |
3PIx-0xx-xxx1 / -xxx2 / -xxx3 | volts per decade | 1 | 1 | 1 |
負載電阻 | k? | >10 | >10 | >10 |
設定點繼電器 | | | |
設定點數(shù)量 | | 2 | 2 | 2 |
范圍 (N2) | mbar | 5×10-5 … 1000 | 5×10-5 … 1000 | 5×10-5 … 1000 |
繼電器觸點 | | n.o., potential free | n.o., potential free | n.o., potential free |
滯后 | % of threshold | 10 | 10 | 10 |
觸點額定固態(tài)繼電器 | V (dc)A (dc) | ≤30 | ≤30 | ≤30 |
觸點額定機械繼電器 | V (dc)A (dc) | ≤30 | ≤30 | ≤30 |
轉換時間 | ms | ≤30 | ≤30 | ≤30 |
接口(數(shù)字) | | RS232C | RS232C | RS232C |
電氣連接 | | | |
3PIx-0xx-x0xx | | FCC, 8-pin | FCC, 8-pin | FCC, 8-pin |
3PIx-0xx-x1xx | | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male |
3PIx-0xx-x2xx | | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male |
3PIx-0xx-x4xx | | D-Sub, 15-pin HD, with RS485, male | D-Sub, 15-pin HD, with RS485, male | D-Sub, 15-pin HD, with RS485, male |
電纜長度 | m (ft.) | ≤100 (≤330) | ≤100 (≤330) | ≤100 (≤330) |
RS232C 運行 | m (ft.) | ≤30 (≤100) | ≤30 (≤100) | ≤30 (≤100) |
暴露于真空的材料 | | W, Ni, NiFe, glass, SnAg, stainless steel | Ni, NiFe, glass, SnAg, stainless steel | Al2O3, stainless steel |
內部容積 | | | |
DN 16 ISO-KF | cm3 | 4.7 | 4.7 | 4.7 |
DN 16 ISO-KF 長管 | cm3 | 14.5 | 14.5 | 14.5 |
DN 16 CF-F | cm3 | 8 | 8 | 8 |
DN 16 CF-R 長管 | cm3 | 14 | 14 | 14 |
DN 25 ISO-KF,4 VCR | cm3 | 5.5 | 5.5 | 5.5 |
8 VCR | cm3 | 7 | 7 | 7 |
1/8'' NPT,7/16-20 UNF | cm3 | 5.2 | 5.2 | 5.2 |
表面貼裝 29 毫米/1.15 英寸 | cm3 | 4.9 | 4.9 | 4.9 |
4 VCR 90° | cm3 | 7.9 | 7.9 | 7.9 |
重量 | | | |
無現(xiàn)場總線接口 | g | 115 … 130 | 115 … 130 | 115 … 130 |
帶現(xiàn)場總線接口 | g | 230 … 250 | 230 … 250 | 230 … 250 |
保護等級 | | IP 40 | IP 40 | IP 40 |
標準 | | | |
CE 合規(guī) | | EN 61000-6-2/-6-3, EN 61010 | EN 61000-6-2/-6-3, EN 61010 | EN 61000-6-2/-6-3, EN 61010 |
ETL 認證 | | UL 61010-1, CSA 22.2 No.61010-1 | UL 61010-1, CSA 22.2 No.61010-1 | UL 61010-1, CSA 22.2 No.61010-1 |
DeviceNet™ | | | |
協(xié)議 | | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only |
數(shù)據(jù)率開關 | kBaud | 125, 250, 500 or network programmable | 125, 250, 500 or network programmable | 125, 250, 500 or network programmable |
電纜長度 125 kbps | m (ft.) | 500 (1650) | 500 (1650) | 500 (1650) |
電纜長度 250 kbps | m (ft.) | 250 (825) | 250 (825) | 250 (825) |
電纜長度 500 kbps | m (ft.) | 100 (330) | 100 (330) | 100 (330) |
MAC ID | | 2 switches (address 00 - 63) or network programmable | 2 switches (address 00 - 63) or network programmable | 2 switches (address 00 - 63) or network programmable |
數(shù)字功能 | | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error |
技術規(guī)格 | | DeviceNet™ "Vacuum Gauge Device Profile" | DeviceNet™ "Vacuum Gauge Device Profile" | DeviceNet™ "Vacuum Gauge Device Profile" |
設備類型 | | ''CG'' for combination gauge | ''CG'' for combination gauge | ''CG'' for combination gauge |
I / O 從屬傳訊 | | polling only | polling only | polling only |
DeviceNet™ 的電源電壓 3PI6- / 3PI7- / 3PI8-0xx-xxxx | V (dc) | +15 … +30 | +15 … +30 | +15 … +30 |
功耗 3PI6- / 3PI7- / 3PI8-0xx-xxxx | W | ≤3 | ≤3 | ≤3 |
DeviceNet 連接器 | | Micro-Style, 5-pin, male | Micro-Style, 5-pin, male | Micro-Style, 5-pin, male |
Profibus DP | | | |
波特率 | kBaudMbaud | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
地址 | | 2 switches (address 00 - 127) or network programmable | 2 switches (address 00 - 127) or network programmable | 2 switches (address 00 - 127) or network programmable |
數(shù)字功能 | | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error |
Profibus DP 連接器 | | D-Sub, 9-pin, female | D-Sub, 9-pin, female | D-Sub, 9-pin, female |
RS485C | | | |
波特率 | kBaud | 9.6 / 19.2 / 38.4 /57.6 | 9.6 / 19.2 / 38.4 /57.6 | 9.6 / 19.2 / 38.4 /57.6 |
地址 | | 2 switches (address 00 - 255) | 2 switches (address 00 - 255) | 2 switches (address 00 - 255) |
數(shù)字功能 | | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error |
RS485 連接器 | | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male |
EtherCAT | | | |
協(xié)議 EtherCAT | | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT |
通訊標準 | | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" |
節(jié)點地址 | | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification |
物理層 | | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) |
EtherCAT 連接器 | | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT |
電纜 | | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher |
電纜長度 | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
過程數(shù)據(jù) | | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping |
郵箱 (CoE) | | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information |