Special plasma system Tetra 8000-LF-PC
Technical data:
Switch cabinet:
W 2000 mm, H 1800 mm, D 1000 mm
Chamber:
W 1700 mm, D 2800 mm, D 1700 mm
Chamber volume:
approx. 8000 litres
Gas supply:
2 gas channels via MFCs
Generator:
4 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
Control
PC control (Windows) with industrial field bus