The production system Tetra 600, with its 600-litrechamber volume and PC control, is used in series production (cleaning, etchingand activation).
Special plasma system Tetra 600-LF-PC
Technical data:
Switch cabinet:
W 600 mm, H 2200 mm, D 1200 mm
Chamber:
W 810 mm, H 810 mm, D 925 mm
Chamber volume:
approx. 600 litres
Gas supply:
2 gas channels via MFCs
Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
Control
PC control (Windows) with industrial field bus