The production system Tetra 260, with its 260-litrechamber volume and PC control, is used in series production (cleaning, etchingand activation).
Special plasma system Tetra 260-LF-PC
Technical data:
Switch cabinet:
W 2500 mm, H 2200 mm, D 1000 mm
Chamber:
W 650 mm, H 500 mm, D 800 mm
Chamber volume:
approx. 260 litres
Gas supply:
2 gas channels via MFCs
Generator:
10 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
Control
PC control (Windows) with industrial field bus